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Record W2048789071 · doi:10.1063/1.1929861

Annealing behavior of low-energy ion-implanted phosphorus in silicon

2005· article· en· W2048789071 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.
fundA Canadian funder is recorded on the work.

Bibliographic record

VenueJournal of Applied Physics · 2005
Typearticle
Languageen
FieldEngineering
TopicSilicon and Solar Cell Technologies
Canadian institutionsWestern University
FundersNatural Sciences and Engineering Research Council of Canada
KeywordsFluenceAnnealing (glass)Ion implantationSiliconMaterials scienceAnalytical Chemistry (journal)OxideIonSecondary ion mass spectrometryAtmospheric temperature rangeRadiochemistryActivation energyChemistryMetallurgyPhysical chemistry

Abstract

fetched live from OpenAlex

Phosphorous diffusion in silicon has been investigated for room-temperature implants of low energy (5, 10, and 30 keV) and fluence between 1×1014 and 5×1015cm−2, followed by rapid thermal annealing in the temperature range of 600–1000 °C. Depth profiles were extracted by time-of-flight secondary-ion-mass spectroscopy. For 5-keV energy implants below 1×1015cm−2 fluence, phosphorus preferentially diffused outwards, i.e., toward the sample surface. Nuclear reaction analysis in combination with chemical stripping of the oxide shows that as much as 50% of the P in annealed samples can accumulate at the surface oxide during a 30-s anneal. At all implant energies, indiffusion of P dominates in the regimes of higher fluence, higher anneal temperature, and longer anneal times.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.453
Threshold uncertainty score0.452

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.009
GPT teacher head0.210
Teacher spread0.201 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it