Annealing behavior of low-energy ion-implanted phosphorus in silicon
Why this work is in the frame
A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.
Bibliographic record
Abstract
Phosphorous diffusion in silicon has been investigated for room-temperature implants of low energy (5, 10, and 30 keV) and fluence between 1×1014 and 5×1015cm−2, followed by rapid thermal annealing in the temperature range of 600–1000 °C. Depth profiles were extracted by time-of-flight secondary-ion-mass spectroscopy. For 5-keV energy implants below 1×1015cm−2 fluence, phosphorus preferentially diffused outwards, i.e., toward the sample surface. Nuclear reaction analysis in combination with chemical stripping of the oxide shows that as much as 50% of the P in annealed samples can accumulate at the surface oxide during a 30-s anneal. At all implant energies, indiffusion of P dominates in the regimes of higher fluence, higher anneal temperature, and longer anneal times.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it