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Record W2051622130 · doi:10.1116/1.2194934

Direct evidence of “spring softening” nonlinearity in micromachined mechanical resonator using optical beam deflection technique

2006· article· en· W2051622130 on OpenAlexaff
Jiuxuan Zhao, Greg E. Bridges, D. J. Thomson

Bibliographic record

VenueJournal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2006
Typearticle
Languageen
FieldEngineering
TopicAdvanced MEMS and NEMS Technologies
Canadian institutionsUniversity of Manitoba
Fundersnot available
KeywordsResonatorSofteningMaterials scienceCapacitive sensingDeflection (physics)ExcitationVoltageNonlinear systemOpticsAcousticsOptoelectronicsPhysicsEngineeringElectrical engineeringComposite material

Abstract

fetched live from OpenAlex

In this article the dynamic behavior of clamped-clamped micromachined mechanical resonators working at a frequency of 150kHz was characterized by electrostatic excitation and detection via both capacitive coupling and optical methods. The experimental results by optical measurement show that this system behaved very much like a simple harmonic oscillator at low actuation levels while significant nonlinearity was observed at higher actuation levels. The nonlinearity identified as “spring softening” type occurred when the product of the dc bias voltage and the ac driving voltage exceeded 0.04V2. Dependence of resonance frequency on dc bias voltage was investigated and the experimental results are in agreement with theoretical predictions. This work also demonstrated that optical detection is much less susceptible to parasitic interference than motion detection via capacitive coupling. Therefore, optical techniques will yield better characterization of the mechanical properties of the resonators.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.126
Threshold uncertainty score0.796

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0010.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0010.000
Bibliometrics0.0010.002
Science and technology studies0.0000.001
Scholarly communication0.0000.001
Open science0.0010.000
Research integrity0.0000.001
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.013
GPT teacher head0.273
Teacher spread0.260 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations14
Published2006
Admission routes1
Has abstractyes

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