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Record W2054689673 · doi:10.1117/12.570271

Repulsive force actuated rotary micromirror

2004· article· en· W2054689673 on OpenAlexaff
Siyuan He, Ridha Ben Mrad

Bibliographic record

VenueProceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004
Typearticle
Languageen
FieldEngineering
TopicAdvanced MEMS and NEMS Technologies
Canadian institutionsUniversity of Toronto
Fundersnot available
KeywordsSurface micromachiningRotation (mathematics)OpticsMicrofabricationMaterials scienceVoltageFabricationPhysicsComputer science

Abstract

fetched live from OpenAlex

In this paper, a novel repulsive force based rotary micromirror is proposed. A repulsive force is produced in the rotary micromirror and the mirror plate is pushed up and away from the substrate. Therefore the rotation angle of the micromirror is not limited to the space underneath the mirror plate and thus the "pull-in" effect is completely circumvented. The novel rotary micromirror can achieve a large rotation angle with a large mirror plate. In addition the novel micromirror has a very simple structure and can be fabricated by standard surface micromachining technology. Numerical simulation is used to verify the working principle of the novel micromirror. A prototype of the novel rotary micromirror is fabricated by a commercially available surface microfabrication process called MUMPs. The prototype has a mirror size of 300μm x 300μm. The experimental measurements show that the prototype can achieve a mechanical rotation of 2.25 degrees (an optical angle of 4.5 degrees) at a driving voltage of 170 volts. A conventional surface micromachined attractive force based rotary micromirror of the same size can only achieve an angle of 0.1~0.2 degree.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: none
Teacher disagreement score0.001
Threshold uncertainty score0.003

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.001
Open science0.0010.001
Research integrity0.0010.001
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.009
GPT teacher head0.221
Teacher spread0.212 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations4
Published2004
Admission routes1
Has abstractyes

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Same venueProceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIESame topicAdvanced MEMS and NEMS TechnologiesFrench-language works237,207