Debris reduction for copper and diamond-like carbon thin films produced by magnetically guided pulsed laser deposition
Bibliographic record
Abstract
The effectiveness of debris reduction using magnetically guided pulsed laser deposition (MGPLD) is reported here. KrF laser pulses (248 nm) of 100 mJ energy were focused to intensities of 6×109 W/cm2 onto the surface of a copper or a carbon source target and a magnetic field of 0.3 T as used to steer the plasma around a curved arc of 0.5 m length to the deposition substrate. Debris counts were compared for films produced by the MGPLD and conventional PLD (nonguided) techniques. A significant reduction in particulates of size greater than 0.1 μm was achieved using MGPLD. For the copper films, particulate count was reduced from 150 000 particles/cm2/nm to 50 particulates/cm2/nm and for diamond-like carbon thin films particulate count was reduced from 25 000 particles/cm2/nm to 1200 particles/cm2/nm.
Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.
How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.002 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".