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Record W2058377865 · doi:10.1088/0960-1317/21/7/075025

Micromachined three-axis thermal accelerometer with a single composite heater

2011· article· en· W2058377865 on OpenAlex
Jamal Bahari, Albert M. Leung

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueJournal of Micromechanics and Microengineering · 2011
Typearticle
Languageen
FieldEngineering
TopicAdvanced MEMS and NEMS Technologies
Canadian institutionsSimon Fraser University
Fundersnot available
KeywordsSurface micromachiningMaterials scienceAccelerometerFabricationBulk micromachiningCantileverMicroprobePolyimideSubstrate (aquarium)Layer (electronics)Microelectromechanical systemsSiliconOptoelectronicsComposite numberThermalAmorphous siliconSensitivity (control systems)Composite materialElectronic engineeringEngineeringCrystalline siliconChemistryComputer science

Abstract

fetched live from OpenAlex

A novel three-axis thermal accelerometer is designed, fabricated, and characterized in this paper. The device includes two half sensor plates attached to buckled cantilevers to form out-of-plane structures. Cantilevers are assembled by a single push of a microprobe and preserve their shapes when they latch into stoppers anchored to the substrate. The fabrication process is based on surface micromachining on silicon substrates using polyimide as the structural layer and amorphous silicon as the sacrificial layer. The fabricated devices are individually packaged and characterized. Using a total heater power of 2.5 mW, the X, Y, and Z axes, respectively, showed sensitivities of 66, 64, and 25 µV g−1. Compared to the earlier versions of the same class accelerometers, the fabricated single heater accelerometer demonstrates more than fourfold sensitivity improvement.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.022
Threshold uncertainty score0.775

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.014
GPT teacher head0.164
Teacher spread0.150 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it