Characterization of solution-bonded GaAs/InGaAs/GaAs features on GaAs
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Bibliographic record
Abstract
Engineered or 'virtual' substrates are of interest to extend the range of epitaxially-grown semiconductor heterostructures available for device applications. To this end, elastically strain-relaxed square features up to 30 µm in size and having an in-plane lattice constant as much as 0.49% larger than the lattice constant of GaAs were fabricated from MOCVD-grown GaAs/In0.08Ga0.92As/GaAs heterostructures by the in-place bonding method, using either AlAs or Al0.7Ga0.3As as the sacrificial layer. TEM images show that the solution-bonded interface is flat with a network of sessile edge dislocations that accommodates the different in-plane lattice constants of the feature and the GaAs substrate and a small rotation of the bonded features. Micro-Raman spectroscopy, which has a spatial resolution of ∼1 µm, was shown to be useful for characterizing lattice mismatch strain ≥ 0.0023, i.e. with an order of magnitude lower sensitivity than high-resolution XRD.
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Full frame distilled prediction
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Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
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Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
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