Electron trapping in 4H-SiC MOS capacitors fabricated by pre-oxidation nitrogen implantation
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Bibliographic record
Abstract
Incorporation of nitrogen (N) atoms by ion implantation prior to oxidation of SiO2/4H-SiC interfaces has been investigated by capacitance-voltage (C-V) characteristics and constant capacitance deep-level-transient spectroscopy (CCDLTS) measurements. The shift of the C-V curves to negative voltages can be explained by the partial activation of implanted N atoms during oxidation. The maximum amplitude of the CCDLTS spectra, proportional to the density of near-interface oxide traps, decreases with increasing N dose, but remains significantly larger than that of SiO2/SiC interfaces fabricated by post oxidation annealing in nitric oxide (NO). Intrinsic defects in the SiC epi-layer associated with implantation damage are also observed in N-implanted samples. In contrast, electron traps energetically close to the SiC conduction band, detected in NO annealed samples and presumably introduced during oxidation, are not observed in N-implanted samples. The improved transport characteristics of MOS transistors fabricated on N-implanted epi-layers compared to those fabricated by NO annealing is suggested to result from the effects of the greater N donor concentration and also possibly to the suppression of shallow electron traps in the SiC epilayer.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
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Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it