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Record W2060451748 · doi:10.1002/mop.21168

Microwave cavity resonators using hard X-ray lithography

2005· article· en· W2060451748 on OpenAlexaff
Zhen Ma, David M. Klymyshyn, Sven Achenbach, J. J. Mohr

Bibliographic record

VenueMicrowave and Optical Technology Letters · 2005
Typearticle
Languageen
FieldEngineering
TopicMicrowave Engineering and Waveguides
Canadian institutionsUniversity of Saskatchewan
Fundersnot available
KeywordsLIGAResonatorMicrowaveLithographyMaterials scienceSurface micromachiningX-ray lithographyWaferMicroelectromechanical systemsFabricationOptoelectronicsSiliconOpticsNanotechnologyResistEngineeringPhysicsTelecommunications

Abstract

fetched live from OpenAlex

The performance of high-Q cavity resonators at microwave frequency using the LIGA micro-fabrication process is investigated. This technique enables the formation of deep-cavity structures with highly vertical and optically smooth sidewalls, leading to potentially high Q. The simulations show promising Q improvement, as compared to silicon structures using micromachining and wafer stacking, especially at higher frequencies. The feasibility of obtaining such cavities with hard X-ray lithography (XRL) is demonstrated. © 2005 Wiley Periodicals, Inc. Microwave Opt Technol Lett 47: 353–357, 2005; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.21168

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.001
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.002
Threshold uncertainty score0.007

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0010.001
Meta-epidemiology (narrow)0.0010.001
Meta-epidemiology (broad)0.0010.000
Bibliometrics0.0000.000
Science and technology studies0.0000.001
Scholarly communication0.0010.001
Open science0.0010.001
Research integrity0.0010.001
Insufficient payload (model declined to judge)0.0020.001

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.009
GPT teacher head0.203
Teacher spread0.194 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations5
Published2005
Admission routes1
Has abstractyes

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