Chemical Vapor Deposition of Cerium Oxide Using the Precursors [Ce(hfac)<sub>3</sub>(glyme)]
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Bibliographic record
Abstract
Precursors of formula [Ce(hfac) 3 {MeO(CH 2 CH 2 O) n Me}], 1 ( n = 1), 2 ( n = 2), and 3 ( n = 3), and [{Ce(hfac) 3 } 2 {μ-MeO(CH 2 CH 2 O) 4 Me}], 4 (hfac = CF 3 COCHCOCF 3 ), have been prepared and used as precursors for chemical vapor deposition (CVD) of films of cerium oxides on the substrates Si, Pt, and TiN. Thermal CVD at 450 °C with oxygen as carrier gas gave mixed Ce(III)/Ce(IV) oxides, and the main crystalline component was Ce 4 O 7, but with fluoride impurity. The fluoride impurity was not observed if CVD was carried out using moist oxygen as carrier gas or if the as-deposited films were annealed in oxygen. Codeposition with [Y(hfac) 3 {MeO(CH 2 CH 2 O) 2 Me}] gave films of the mixed Ce(IV)Y(III) oxide Ce 2 Y 2 O 7 . The depositions of cerium oxides could be enhanced by use of a palladium precursor catalyst [Pd(2-methylallyl)(acetylacetonate)] and could then be carried out at 250 °C, giving films of CeO 2 . Under carefully controlled conditions, films of ceria-supported palladium could be prepared by this method. The films were characterized by using X-ray photoelectron spectroscopy, scanning electron microscopy, and X-ray diffraction techniques.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.003 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it