RF-MEMS switches with new beam geometries: improvement of yield and lowering of actuation voltage
Bibliographic record
Abstract
One main obstacle that reduces the yield in RF MEMS technology is the variation of the residual stress resulting from fabrication. Residual stress can occur across the wafer, from the wafer to another wafer, or from one batch of fabrication to another one, and is more pronounced in cantilever bean type switches. For the present paper we have used new sets of dimples to reduce the sensitivity of the structure to the stress level. The SEM pictures of the proposed configuration and those of the conventional beam switch fabricated on the same wafer are analyzed sufficiently. The comparison amply proves soundness of our method. The high actuation voltage is another main issue that requires considerable investigation, and is generally higher in clamped-clamped beam type switches. In order to reduce the actuation voltage, we have designed, fabricated and tested several configurations with different supporting beams. The actuation voltage of as low as 10 volts is achieved and all switches exhibit excellent RF performance. At 40GHz the insertion loss of the switches varies ranging from 0.35dB to 0.7dB. It is evident that at a lower frequency ranges this becomes even better. At 40GHz, the return loss for all switches measured -24dB. Lastly, isolation is better than 20dB to 30dB for all the frequency band of interest.
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How this classification was reachedexpand
Direct model labels (unvalidated)
Per-model category and study-design labels from the labeling rounds. They are machine output, unvalidated, and the disagreement between models ships as data. No study design here is MEDLINE-validated yet.
| Model arm | Categories | Study design | Confidence |
|---|---|---|---|
| gemma | no category Domain: not available · Genre: Empirical About the Canadian research system: no · About a Canadian topic: no | Bench or experimental | low |
| gpt | no category Domain: not available · Genre: Empirical About the Canadian research system: no · About a Canadian topic: no | Bench or experimental | low |
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedLabeled directly by 2 models reading the full record.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".