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Record W2062275184 · doi:10.1116/1.1496512

Scanning spreading resistance microscopy current transport studies on doped III–V semiconductors

2002· article· en· W2062275184 on OpenAlexaff
Ryan Lu, K. L. Kavanagh, St. J. Dixon-Warren, A. J. SpringThorpe, R. W. Streater, I. D. Calder

Bibliographic record

VenueJournal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002
Typearticle
Languageen
FieldPhysics and Astronomy
TopicSemiconductor materials and interfaces
Canadian institutionsNortel (Canada)Simon Fraser University
Fundersnot available
KeywordsThermionic emissionDopingDopantSpreading resistance profilingMaterials scienceSemiconductorMolecular beam epitaxyOptoelectronicsPlanarAnalytical Chemistry (journal)Contact resistanceNanotechnologyChemistryEpitaxy

Abstract

fetched live from OpenAlex

Two-dimensional (2D) carrier concentration profiling using scanning spreading resistance microscopy (SSRM) has been carried out on molecular beam epitaxy-grown GaAs and InP dopant calibration samples. The current transport mechanisms between the diamond-coated SSRM tip and the III–V semiconductor cleaved surface (110) was investigated as a function of semiconductor dopant concentration via current–voltage (I–V) measurement. A positive or negative tip bias was applied while scanning over each dopant concentration region (1016–1019 cm−3). The results were compared to simulated I–V curves based on thermionic emission theory. The best fits to the data obtained under forward bias indicated that the contact barrier heights, φb, were much lower than expected from conventional large area planar contacts to GaAs or InP. The effect increases with increasing doping concentration, as a result of a combination of barrier height lowering mechanisms such as image forces, thermionic field emission and minority carrier injection. Under reverse bias, the thermionic emission theory only holds for highly doped semiconductors while for low doping, surface and bulk generation currents determine the overall detectable SSRM current.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.001
Threshold uncertainty score0.003

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.038
GPT teacher head0.288
Teacher spread0.250 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations41
Published2002
Admission routes1
Has abstractyes

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