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Record W2063752485 · doi:10.1117/12.839522

Temporal phase shifting method using acoustic-optic modulated stroboscopic interferometer (AOMSI) for characterization of microstructures

2009· article· en· W2063752485 on OpenAlexaff
Davoud Mohammadalizadeh, Muthukumaran Packirisamy, N.R. Sivakumar

Bibliographic record

VenueProceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009
Typearticle
Languageen
FieldComputer Science
TopicOptical measurement and interference techniques
Canadian institutionsConcordia University
Fundersnot available
KeywordsStroboscopeInterferometryCantileverOpticsMaterials sciencePhase (matter)WaferLinearityCharacterization (materials science)AcousticsOptoelectronicsElectronic engineeringPhysicsEngineering

Abstract

fetched live from OpenAlex

Temporal phase shifting method, which is commonly used for characterization of the microstructures, requiring phaseshifter has inherent errors due to non-linearity. To overcome this, an Acoustic-Optic Modulated Stroboscopic Interferometer (AOMSI) was developed using the principle of Stroboscopic Interferometer. The technique utilizes the advantage of stroboscopy to create phase shifted images without requiring any component for phase shifting. Using Carré algorithm and developed AOMSI the curvature of microstructures due to residual stress was extracted. Experiments were performed on a silicon wafer to demonstrate the feasibility of the presented technique. Further, experiments were performed on a designed micro cantilever to extract surface-height information using the proposed method. To verify the accuracy of the presented method, the same micro cantilever was characterized using a WYKO surface profiler and the comparison was found to be in good agreement.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.358
Threshold uncertainty score1.000

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0010.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0010.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.001
Open science0.0010.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.026
GPT teacher head0.288
Teacher spread0.261 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations2
Published2009
Admission routes1
Has abstractyes

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Same venueProceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIESame topicOptical measurement and interference techniquesFrench-language works237,207