Microfabrication of capacitive pressure sensors using ferrofluid sacrificial layers
Bibliographic record
Abstract
A novel micromachined capacitive pressure sensor that is fabricated using a liquid-phase sacrificial layer is reported. Ferrofluid serves as the sacrificial layer in the microfabrication process, enabling extremely simple, fast, and low-cost production of the sensor, while eliminating the need for photolithographic, bonding, and/or chemical processes. The entire sensor fabrication is performed at/near room temperature. The sensor is based on the 1.5×1.5-mm2stainless-steel chip with a 10-μm-deep capacitive cavity. A Parylene-C membrane with a Ti electrode is formed to seal the cavity by depositing it directly on top of the ferrofluid filled in the cavity. The ferrofluid is magnetically extracted from the cavity, suspending the membrane to form the sensing capacitor. A highly linear response with a sensitivity of 12.4 fF/KPa is obtained with the fabricated device. The temperature dependence of the sensor capacitance is experimentally characterized and reported as well.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.001 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".