MétaCan
Menu
Back to cohort
Record W2066452958 · doi:10.1116/1.3517620

Nanofluidic channels fabricated by e-beam lithography and polymer reflow sealing

2010· article· en· W2066452958 on OpenAlexaff
Mina Fouad, Mustafa Yavuz, Bo Cui

Bibliographic record

VenueJournal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010
Typearticle
Languageen
FieldEngineering
TopicNanopore and Nanochannel Transport Studies
Canadian institutionsUniversity of Waterloo
Fundersnot available
KeywordsResistMaterials scienceLithographyElectron-beam lithographyPolymerPolystyreneMethyl methacrylatePhotolithographyBilayerNanotechnologyOptoelectronicsBeam (structure)Channel (broadcasting)Layer (electronics)Composite materialOpticsChemistryPolymerizationMembraneElectrical engineering

Abstract

fetched live from OpenAlex

The authors developed a facile approach for creating nanofluidic channels by electron beam lithography that used a bilayer e-beam resist consisting of poly(methyl methacrylate) (PMMA) on top of poly(dimethyl glutarimide) (PMGI). In the process, the more sensitive PMGI was fully exposed with channel patterns, and the less sensitive PMMA was only fully exposed with a chain of dot patterns right above the channel patterns. PMMA was then developed to form a chain of holes through which PMGI channels were developed. After closing the holes by thermal reflowing PMMA, channels in PMGI were sealed with PMMA. The current method is capable of fabricating simultaneously channels with different channel widths.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.001
Threshold uncertainty score0.002

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.001
Scholarly communication0.0000.001
Open science0.0000.000
Research integrity0.0010.001
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.006
GPT teacher head0.197
Teacher spread0.191 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations17
Published2010
Admission routes1
Has abstractyes

Explore more

Same venueJournal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and PhenomenaSame topicNanopore and Nanochannel Transport StudiesFrench-language works237,207