The modeling of excimer laser particle removal from hydrophilic silicon surfaces
Bibliographic record
Abstract
We summarize experimental results on the successful removal of submicron-sized polystyrene latex, carboxylate-modified latex, SiO2, and Al2O3 particles from hydrophilic silicon surfaces by excimer laser, using both dry and steam cleaning; the cleaning and damage thresholds have also been determined for these particles. Adhesion and removal models for an ideal sphere particle, that include van der Waals forces, hydrogen bonding, and thermoelastic effects, theoretically explain the laser cleaning results. Two models of the removal force due to the explosive evaporation of liquid film have been calculated and compared. The effects of both asperities on the particle surface and particle aggregation have also been considered. The results of the calculations show that even those surface asperities which are small compared with the particle dimension can cause a large reduction in both adhesion and thermoelastic removal forces. The theoretical predictions are consistent with the experimental observations.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.001 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".