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Record W2067932159 · doi:10.1063/1.372391

The modeling of excimer laser particle removal from hydrophilic silicon surfaces

2000· article· en· W2067932159 on OpenAlexafffund
Xinhui Wu, E. Sacher, Michel Meunier

Bibliographic record

VenueJournal of Applied Physics · 2000
Typearticle
Languageen
FieldEngineering
TopicLaser Material Processing Techniques
Canadian institutionsPolytechnique Montréal
FundersNatural Sciences and Engineering Research Council of Canada
KeywordsParticle (ecology)Thermoelastic dampingMaterials scienceExcimer laserSiliconAdhesionvan der Waals forceEvaporationComposite materialLaserChemistryOpticsThermodynamicsThermalMetallurgyMolecule

Abstract

fetched live from OpenAlex

We summarize experimental results on the successful removal of submicron-sized polystyrene latex, carboxylate-modified latex, SiO2, and Al2O3 particles from hydrophilic silicon surfaces by excimer laser, using both dry and steam cleaning; the cleaning and damage thresholds have also been determined for these particles. Adhesion and removal models for an ideal sphere particle, that include van der Waals forces, hydrogen bonding, and thermoelastic effects, theoretically explain the laser cleaning results. Two models of the removal force due to the explosive evaporation of liquid film have been calculated and compared. The effects of both asperities on the particle surface and particle aggregation have also been considered. The results of the calculations show that even those surface asperities which are small compared with the particle dimension can cause a large reduction in both adhesion and thermoelastic removal forces. The theoretical predictions are consistent with the experimental observations.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Simulation or modeling · Consensus signal: Simulation or modeling
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.007
Threshold uncertainty score0.014

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0010.000
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.012
GPT teacher head0.212
Teacher spread0.200 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designSimulation or modeling
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations43
Published2000
Admission routes2
Has abstractyes

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