Experimental Analysis of Vibration of Micromachined Resonators
Why this work is in the frame
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Bibliographic record
Abstract
Among many different mechanisms that are used for excitation and detection of vibration of micro-beam resonators, electrostatic comb-drives have the benefit of simplicity and large range of linear operation. The disadvantage of using comb-drives is the effect of added mass to the beam; however, the analytical model of the beam-mass system predicts that this shortcoming can be overcome by proper adjustment of the mass, rotary inertia, and location of the comb-drive. In addition, the analytical model can predict the effect of the axial force of the beam on the resonance frequencies. In this paper, the results of the experiments on two resonators are presented. These results are used to verify the validity of the analytical model and finding its parameters. Very close agreement between the theory and experiment is observed. The residual stress of the MEMS structural layer is measured using the calibrated analytical model parameters.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.001 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it