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Record W2069186520 · doi:10.1115/imece2008-66292

Experimental Analysis of Vibration of Micromachined Resonators

2008· article· en· W2069186520 on OpenAlex
Pezhman A. Hassanpour, Ebrahim Esmailzadeh, William L. Cleghorn, James K. Mills

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueVolume 13: Nano-Manufacturing Technology; and Micro and Nano Systems, Parts A and B · 2008
Typearticle
Languageen
FieldEngineering
TopicAdvanced MEMS and NEMS Technologies
Canadian institutionsOntario Tech UniversityUniversity of Toronto
Fundersnot available
KeywordsResonatorBeam (structure)VibrationInertiaMicroelectromechanical systemsResonance (particle physics)Residual stressSurface micromachiningComb driveMaterials scienceAcousticsRange (aeronautics)Stress (linguistics)ExcitationMechanicsPhysicsEngineeringOpticsOptoelectronicsClassical mechanicsElectrical engineeringAtomic physicsFabrication

Abstract

fetched live from OpenAlex

Among many different mechanisms that are used for excitation and detection of vibration of micro-beam resonators, electrostatic comb-drives have the benefit of simplicity and large range of linear operation. The disadvantage of using comb-drives is the effect of added mass to the beam; however, the analytical model of the beam-mass system predicts that this shortcoming can be overcome by proper adjustment of the mass, rotary inertia, and location of the comb-drive. In addition, the analytical model can predict the effect of the axial force of the beam on the resonance frequencies. In this paper, the results of the experiments on two resonators are presented. These results are used to verify the validity of the analytical model and finding its parameters. Very close agreement between the theory and experiment is observed. The residual stress of the MEMS structural layer is measured using the calibrated analytical model parameters.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.022
Threshold uncertainty score0.880

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0010.000
Bibliometrics0.0010.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.008
GPT teacher head0.204
Teacher spread0.196 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it