Dry etch process optimization for small-area<i>a</i>-Si:H vertical thin film transistor
Bibliographic record
Abstract
This article reports the investigation of dry etch processes suitable for small-area amorphous silicon (a-Si:H) vertical thin film transistor (VTFT) fabrication. SF6/O2 and CF4/H2 gas mixtures were experimented on for the anisotropic etching of an n+a-Si:H/a-SiNx:H/n+a-Si:H trilayer to give a self-aligned vertical drain–source stacked structure that is desirable for subsequent deposition of the VTFT channel layers. The results show that the trilayer profiles formed with the SF6/O2 plasma for different O2 concentrations suffered different degrees of undercutting of the composite layers under overetching condition, leading to misaligned etch profiles. On the other hand, the CF4/20%H2 plasma provides a self-aligned vertical trilayer profile even after 1 min of overetching.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.001 | 0.002 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".