An optical scanner based on cantilever-type electrostatic zipping actuators
Bibliographic record
Abstract
This paper discusses modeling, design, fabrication and characterization of an optical scanner based on cantilever-type electrostatic zipping actuators. The electrostatic actuator has been designed to achieve high displacements for large optical scanning angles at lower actuation voltages. The zipping actuators are fabricated using multi-layer polysilicon foundry fabrication processes. The electrostatic force between the cantilever and the bottom electrode on the substrate pulls the cantilever down. With a warped cantilever, the force closes the gap from the anchored end and gradually the zipping effect actuates the entire cantilever. In our design, mechanical structures are arranged to avoid electrical shortcircuit. With various annealing temperatures, the warped angles are controllable. The cantilever serves as a reflective surface and the high out-of-plane displacement is used to steer a reflected laser beam for imaging and scanning applications. In this paper we present the design considerations in electrostatic zipping actuator displacement and control as well as the arrangement for optical scanning.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".