Indium oxides by reactive ion beam assisted evaporation: From material study to device application
Bibliographic record
Abstract
Indium oxides were deposited by reactive ion beam assisted e-beam evaporation at room temperature. A material study was conducted through a variety of material characterization including crystal structure, electrical properties, optical properties, and chemical composition, along with an investigation of material properties as a function of primary deposition parameters such as ion flux and deposition rate. Implementing the developed semiconducting indium oxide as a channel material, the authors further demonstrated high-performance indium oxide thin-film transistors (TFTs) with conventional silicon dioxide gate dielectric derived by plasma-enhanced chemical vapor deposition (PECVD). The n-channel TFT has a threshold voltage of ∼2.0 V, a field-effect mobility of 33 cm2/V s at a gate bias of 20 V, an ON/OFF current ratio of 108, and a subthreshold slope of 2.0 V/decade. The stability study displays a small threshold voltage shift of ∼0.6 V under a 60 h constant current stress condition. The TFT reported here has one of the best performance characteristics in terms of field-effect mobility, ON/OFF current ratio, OFF current and device stability, using conventional and large-area foundry-compatible PECVD gate dielectrics. The device performance coupled with PECVD dielectrics makes ion beam assisted e-beam evaporation derived indium oxide TFT a promising candidate for active matrix flat-panel displays.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".