Cavity formation in bonded silicon wafers using partially cured dry etch bisbenzocyclobutene (BCB)
Bibliographic record
Abstract
A method of forming hidden cavities in bonded silicon wafers using dry etch Bisbenzocyclobutene (BCB) is presented. The cavities are formed by vacuum bonding of partially-cured patterned BCB over a Silicon on Insulator (SOI) wafer and over a bare silicon wafer in a low temperature process. The vacuum bonding process parameters are determined through an iterative process that involves SEM inspection of the BCB layer at the bonding surface to ensure a void and wrinkle free strong bond. The cavities can be as small as 28 μm wide with a support margin of only 10 μm and a height of 800 nm. Cavities of other dimensions can also be realized following the same procedure. The cavities can be used to realize MEMS microphones, capacitive micromachined ultrasonic transducers (CMUT), resonant cavities, and also for protective encapsulation of MEMS and microelectronic dies.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.001 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".