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Record W2074092473 · doi:10.1117/12.566423

Amplified piezoelectric actuator with fine linear resolution

2004· article· en· W2074092473 on OpenAlexaff
Weiguo Zu, Xijia Gu

Bibliographic record

VenueProceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004
Typearticle
Languageen
FieldEngineering
TopicPiezoelectric Actuators and Control
Canadian institutionsToronto Metropolitan University
Fundersnot available
KeywordsActuatorLinear variable differential transformerDisplacement (psychology)Materials scienceAcousticsOpticsTransformerComputer scienceControl theory (sociology)Physics

Abstract

fetched live from OpenAlex

Actuators with large strokes and fine resolution have many applications, such as precise positioning, high resolution lithographing, sub-micro machining and fine manipulation of cells in biomedical fields. In this paper, a compact design of an elliptic-shaped actuator using 16 flexural hinges is presented. The device used two piezo stacks in long axis to generate amplified displacement in short axis. Overall displacement of more than 1 mm was obtained from a piezo-stack displacement of 40 μm. A feedback loop was designed to control the motion using a linear variable differential transformer (LVDT). The design achieved a fine resolution of ~20 nm. One unique feature of the design is its thermal stability. Its invar frame minimizes the change of the short axis length when temperature varies. The actuator was applied to drive an optical tunable filter. Wide tuning range and excellent wavelength tuning repeatability of ± 15 pm were achieved with the LVDT feedback loop.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: none
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.686
Threshold uncertainty score1.000

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.001
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0010.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.007
GPT teacher head0.200
Teacher spread0.193 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations0
Published2004
Admission routes1
Has abstractyes

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Same venueProceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIESame topicPiezoelectric Actuators and ControlFrench-language works237,207