Plasma treatment of porous SiNx:H films for the fabrication of porous-dense multilayer optical filters with tailored interfaces
Bibliographic record
Abstract
Porous and dense silicon nitride films with low (1.58) and high (1.88) refractive indices were prepared by using successively microwave and radio frequency (rf) plasma-enhanced chemical vapor deposition. Surface treatments were performed on porous layers using argon and nitrogen rf plasmas in order to densify and flatten their surface, and hence to obtain an abrupt transition between porous and dense films. The processes during deposition and interface treatment were studied by in situ real-time spectroscopic ellipsometry as well as by other characterization techniques. We show that besides the densification effect, preferential sputtering and annealing phenomena occur during plasma treatments at high bias (∣VBtreat∣>400V), leading to silicon enrichment at the film surface and chemical stabilization of the film bulk. Using atomic force microscopy, we observed a significant reduction of the thickness of the surface roughness layer after treatment for single layers (≈70% reduction) and multilayer stacks (≈60% reduction). Porous-dense Fabry-Pérot filters were fabricated using this approach that led to both enhanced optical performance due to minimized interface thickness and improved environmental stability.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".