Removing 20 nm Particles Using a Supersonic Argon Particle Beam Generated with a Contoured Laval Nozzle
Bibliographic record
Abstract
A cryogenic particle beam is an effective means of removing nano-sized contaminant particles, but the particle beam generated with a simple-hole nozzle has not been successful in removing particles smaller than 30 nm. Based on molecular dynamics (MD) simulation results that smaller cryogenic particles moving at a higher velocity are more effective in removing contaminant particles in the 10 nm range, a contoured Laval nozzle of a particular expansion angle and length was used in this study, instead of the simple-hole nozzle, to generate particle beams of high intensity and controlled size moving at high velocities. A variety of particle size and velocity were obtained by controlling the stagnation pressure/temperature and the back pressure, and using Laval nozzles with differing throat sizes and expansion angles. The new particle beams could remove almost completely a variety of ceramic and Cu particles, down to 20 nm size range, on a flat surface or in trenches.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".