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Record W2079700191 · doi:10.1063/1.1527693

Ultrahigh-density, nonlithographic, sub-100 nm pattern transfer by ion implantation and selective chemical etching

2002· article· en· W2079700191 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueApplied Physics Letters · 2002
Typearticle
Languageen
FieldMaterials Science
TopicAnodic Oxide Films and Nanostructures
Canadian institutionsWestern UniversityUniversity of Toronto
Fundersnot available
KeywordsMaterials scienceEtching (microfabrication)Isotropic etchingIon implantationIrradiationNanometreIonOptoelectronicsReactive-ion etchingAnalytical Chemistry (journal)NanotechnologyLayer (electronics)Composite materialChemistry

Abstract

fetched live from OpenAlex

A self-assembled array of nanometer-sized holes in alumina has been adapted as a mask for conventional, broad-area, ion implantation. The mask pattern, made up of nanoholes arranged in a two-dimensional triangular array with a 100 nm period and a 55 nm diameter pore size, has been successfully transferred onto single crystal (100) SrTiO3 substrates using 200 and 500 keV energy Pt ion bombardments, at fluences sufficient to amorphize the exposed areas. The amorphized material was removed by selective chemical etching resulting in a periodic array of holes about 55 nm in diameter and 115 nm deep. This parallel, nonlithographic approach is adaptable to submicron depth, variable array geometry and scale, and to any material where a selective etch can be found for the irradiated volume.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.007
Threshold uncertainty score0.788

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.006
GPT teacher head0.190
Teacher spread0.184 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it