Advanced Surface Preparation Development on a 300 mm Single Wafer Spin-on Platform
Bibliographic record
Abstract
Focus has been made on the so-called "Leti BKM-Clean" advanced surface preparation, developed on a 300 mm single wafer spin-on platform. Based on the "Dilute Dynamic Clean" (DDC) knowledge [1], dilute HF/HCl and O3/HCl chemistries have been investigated here in combined spin-on and immersion mode. Depending on the specific FEOL cleaning step requirements, the HF/HCl step can be tuned in order to precisely control the partial or total silicon surface de-oxidation as for pre-gate cleanings which require a controlled chemical oxide re-growth. In this last case, the Leti BKM-Clean presents good particle performance up to 65 nm particles size, good particle and metallic removal efficiency without any feature damage generation on high-K /TiN/poly-Si lines structures with an aspect ratio lower than 4.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".