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Record W2080426093 · doi:10.1088/0960-1317/16/8/020

Processing of a semiconductor wafer using the femtosecond laser directly from an oscillator

2006· article· en· W2080426093 on OpenAlex
Krishnan Venkatakrishnan, Bo Tan

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueJournal of Micromechanics and Microengineering · 2006
Typearticle
Languageen
FieldEngineering
TopicIntegrated Circuits and Semiconductor Failure Analysis
Canadian institutionsToronto Metropolitan University
Fundersnot available
KeywordsFemtosecondWaferMaterials scienceLaserOptoelectronicsSemiconductorSemiconductor device fabricationPulse (music)Focused ion beamElectronic engineeringOpticsEngineeringIonPhysics

Abstract

fetched live from OpenAlex

A focused ion beam (FIB) is extensively used in various semiconductor processing applications, although the process is expensive and slow. In this paper we introduce an alternative technique using femtosecond laser pulse emitting directly from a laser oscillator. We demonstrated layer-by-layer removal in an IC circuit for inspection/failure analysis without damaging the underlying structures. There are two prime advantages of this technique. Firstly, the cost of the system is a fraction of that of a FIB machine. Secondly, the machine time is significantly shortened compared to that of a FIB process. Means to improve the accuracy, quality and resolution using a femtosecond laser pulse from the oscillator is discussed.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.072
Threshold uncertainty score0.688

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.007
GPT teacher head0.196
Teacher spread0.189 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it