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Record W2083068379 · doi:10.1063/1.1517054

Inverse problem theory in the optical depth profilometry of thin films

2002· article· en· W2083068379 on OpenAlexaff
J. F. Power

Bibliographic record

VenueReview of Scientific Instruments · 2002
Typearticle
Languageen
FieldEngineering
TopicPhotoacoustic and Ultrasonic Imaging
Canadian institutionsMcGill University
Fundersnot available
KeywordsOpticsInverse problemMaterials scienceProfilometerMicroscopyProfiling (computer programming)A priori and a posterioriPlanarNondestructive testingPhotothermal spectroscopyMicroscopeComputer sciencePhotothermal therapySurface finishPhysicsMathematics

Abstract

fetched live from OpenAlex

The problem of nondestructive measurement of composition with depth on the scale of ∼0.1–500 μm, in polymers and related materials, has many applications in traditional and recent areas of thin film processing. This article reviews the optical depth profilometry techniques operating on this scale based on optical absorption, photoluminescence, elastic, and inelastic scattering. These methods include photoacoustic and photothermal imaging (including pulsed laser opto–acoustic profiling), attenuated total reflectance infrared, integrated optical spectroscopy methods (based on excitation of planar waveguide structures), confocal scanning microscopy, and the recent technique of light profile microscopy. The profiling of planar structures is emphasized. A common element of all of these methods is that depth mapping requires the solution of a linear inverse problem, where a map of the sample properties is mathematically reconstructed from a set of experimental measurements. This problem is to some extent ill conditioned in some or all regimes of measurement, with the result that depth maps may show sensitivity to data errors. A method is presented for assessing performance of the above experimental depth profilometry techniques in terms of ill conditioning as indicated by: spatial resolution, sensitivity to data errors, and apparent multiplicity of solutions. This method is applied a priori given a knowledge of the linear response theory and measurement parameters Application is made to individual profiling techniques, the performance of each in applications is reviewed, and an inter-comparison is made based on the conditioning of the inverse problem.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.002
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Other design · Consensus signal: none
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.815
Threshold uncertainty score0.343

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0020.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.001
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.019
GPT teacher head0.237
Teacher spread0.218 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designOther design
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations36
Published2002
Admission routes1
Has abstractyes

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