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Record W2088112225 · doi:10.1063/1.3305319

Dynamics of reactive high-power impulse magnetron sputtering discharge studied by time- and space-resolved optical emission spectroscopy and fast imaging

2010· article· en· W2088112225 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.
fundA Canadian funder is recorded on the work.

Bibliographic record

VenueJournal of Applied Physics · 2010
Typearticle
Languageen
FieldEngineering
TopicMetal and Thin Film Mechanics
Canadian institutionsPolytechnique Montréal
FundersConsortium de Recherche et d’innovation en Aérospatiale au Québec
KeywordsSputteringHigh-power impulse magnetron sputteringPlasmaAtomic physicsSputter depositionSpectroscopyMaterials scienceAnalytical Chemistry (journal)Ignition systemPlasma diagnosticsExcited stateImpulse (physics)OpticsChemistryPhysicsThin film

Abstract

fetched live from OpenAlex

Time- and space-resolved optical emission spectroscopy and fast imaging were used for the investigation of the plasma dynamics of high-power impulse magnetron sputtering discharges. 200 μs pulses with a 50 Hz repetition frequency were applied to a Cr target in Ar, N2, and N2/Ar mixtures and in a pressure range from 0.7 to 2.66 Pa. The power density peaked at 2.2–6 kW cm−2. Evidence of dominating self-sputtering was found for all investigated conditions. Up to four different discharge phases within each pulse were identified: (i) the ignition phase, (ii) the high-current metal-dominated phase, (iii) the transient phase, and (iv) the low-current gas-dominated phase. The emission of working gas excited by fast electrons penetrating the space in-between the electrodes during the ignition phase spread far outwards from the target at a speed of 24 km s−1 in 1.3 Pa of Ar and at 7.5 km s−1 in 1.3 Pa of N2. The dense metal plasma created next to the target propagated in the reactor at a speed ranging from 0.7 to 3.5 km s−1, depending on the working gas composition and the pressure. In fact, it increased with higher N2 concentration and lower pressure. The form of the propagating plasma wave changed from a hemispherical shape in Ar, to a droplike shape extending far from the target in N2. An important N2 emission rise in the latter case was detected during the transition at the end of the metal-dominated phase.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.109
Threshold uncertainty score0.675

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.001
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.002
GPT teacher head0.188
Teacher spread0.186 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it