Generation and Detection of 400-MHz-Band Surface Acoustic Waves Using the Phase Velocity Scanning Method
Bibliographic record
Abstract
We succeeded in generating and detecting high-frequency surface acoustic waves (SAWs) up to 400 MHz by improving an apparatus for the scanning interference fringes (SIF) approach of the phase velocity scanning method using an optical knife-edge technique with a single lens. Using the new SIF apparatus, we confirmed that we are able to measure the SAW velocity anisotropy of a single-crystal Si(001) wafer within 0.1% relative error. We also measured the velocity anisotropy of Sezawa waves on a Si(001) wafer with a 1430-nm-thick Cu film and estimated Young's modulus and thickness of the Cu film by an inverse analysis. The estimated Young's modulus was close to that of bulk Cu (129.8 GPa). On a single-crystal Si(001) wafer with thinner Cu films (270–700 nm), we measured the SAW velocity along the [110] direction of the Si substrate by the time-of-flight method. The measured velocities decreased with increasing film thickness. The measured velocity for the thicker sample approximated the group velocity calculated from the estimated value for 1430-nm-thick Cu film by the inverse analysis.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".