Sputter-etching characteristics of barium–strontium–titanate and bismuth–strontium–tantalate using a surface-wave high-density plasma reactor
Why this work is in the frame
A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.
Bibliographic record
Abstract
The etching of barium–strontium–titanate (BST) and bismuth–strontium–tantalate (SBT) deposited using a pulsed laser deposition technique has been investigated using a nonreactive (argon) surface-wave high-density plasma source. The etch rate of the rf-biased thin films was determined as a function of the self-bias voltage, of the magnetic field intensity and of the gas pressure. It was found that high etch rates with a good selectivity over resist can be achieved without any plasma chemistry, provided the plasma is operated in the very low pressure regime (i.e., below 1 mTorr). For SBT, etch rates as high as 3000 Å/min with a selectivity of 0.2 over HPR-504 photoresist were obtained with self-bias voltages lower than 150 V. It is also found that even though BST and SBT present similar sputter-etching characteristics, SBT is etched about two times faster than BST as a result of the difference in the atomic density of each material.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.001 | 0.002 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it