Defect-enhanced photo-detection at 1550 nm in a silicon waveguide formed via LOCOS
Bibliographic record
Abstract
We present the integration of a defect-enhanced photodiode with high sensitivity at 1550 nm with a silicon waveguide structure formed by the LOCOS (LOCal Oxidation of Silicon) process. The defects are introduced through a 4 MeV Si + implantation followed by thermal treatment at 200–500 °C to form a sub-bandgap photo-response. A 100 nm polycrystalline silicon layer forms a self-aligned contact to the top of the ridge waveguide and provides efficient extraction of generated carriers. Processing conditions and device structure design have been varied to determine their influence on responsivity, insertion loss and leakage current. A 6 mm long optical power monitor is presented with responsivity of approximately 47 mA W −1 at −5 V bias for an absorption of 12 dB (∼0.003 A W −1 dB −1 ).
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".