Design and Demonstration of an In-Plane Silicon-on-Insulator Optical MEMS Fabry–Pérot-Based Accelerometer Integrated With Channel Waveguides
Why this work is in the frame
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Bibliographic record
Abstract
In this paper, we present a novel optical microelectromechanical systems (MEMS) accelerometer sensor dedicated to space applications. An in-plane Fabry-Pérot (FP) microcavity (FPM) with two distributed Bragg reflectors (DBRs) is used to detect the acceleration. One of the DBR mirrors is attached to two suspended proof masses, allowing the FP gap to change while proof masses experience acceleration. Acceleration is then detected by measuring the spectral shift of the FPM. The optical accelerometer presented here uses silicon strip waveguides integrated with MEMS on a single silicon-on-insulator wafer, making it compact and robust. All of the device components are fabricated using one single fabrication step. Immunity to electromagnetic interference, high sensitivity and resolution capability, integrability, reliability, low cross-sensitivity, simple fabrication, and possibility of having two- and three-axis sensitivities are numerous advantages of our sensor compared to the conventional ones. The sensor performance demonstrated a 90-nm/g sensitivity and 111-μg resolution and better than 250-mg dynamic range.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it