Low leakage a-Si:H thin film transistors deposited on glass substrates using hot-wire chemical vapor deposition
Bibliographic record
Abstract
Stable, low leakage current hot-wire chemical vapor deposition (HWCVD) thin film transistors (TFTs) were fabricated using graphite filament on Corning 1737 glass substrates. TFTs were deposited using a bottom gate, inverted staggered, self-aligned, low temperature process with a molybdenum metal gate, a trilayer consisting of a HWCVD a-Si:Hi layer sandwiched between two plasma enhanced chemical vapor deposition (PECVD) a-SiNx:H layers, followed by a PECVD n+ a-Si:H Ohmic contact layer, and a final aluminum metal for source and drain contacts. Ion∕Ioff ratio exceeds 108 and the leakage current is less than 10−13A, while the field effect mobility is in the range of 0.13cm2∕Vs and the subthreshold slope is 0.6V∕decade. Time stress bias measurements show β of 0.156 for HW a-Si TFTs, showing superior stability compared to their fully PECVD counterparts.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.001 | 0.002 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".