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Record W2092784013 · doi:10.1116/1.2183296

Low leakage a-Si:H thin film transistors deposited on glass substrates using hot-wire chemical vapor deposition

2006· article· en· W2092784013 on OpenAlexafffund
Farhad Taghibakhsh, K. S. Karim, A. Madan

Bibliographic record

VenueJournal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2006
Typearticle
Languageen
FieldEngineering
TopicThin-Film Transistor Technologies
Canadian institutionsSimon Fraser University
FundersNatural Sciences and Engineering Research Council of CanadaSimon Fraser University
KeywordsPlasma-enhanced chemical vapor depositionMaterials scienceThin-film transistorChemical vapor depositionOptoelectronicsLeakage (economics)Ohmic contactLayer (electronics)Thin filmSubthreshold slopeTransistorField-effect transistorNanotechnologyElectrical engineering

Abstract

fetched live from OpenAlex

Stable, low leakage current hot-wire chemical vapor deposition (HWCVD) thin film transistors (TFTs) were fabricated using graphite filament on Corning 1737 glass substrates. TFTs were deposited using a bottom gate, inverted staggered, self-aligned, low temperature process with a molybdenum metal gate, a trilayer consisting of a HWCVD a-Si:Hi layer sandwiched between two plasma enhanced chemical vapor deposition (PECVD) a-SiNx:H layers, followed by a PECVD n+ a-Si:H Ohmic contact layer, and a final aluminum metal for source and drain contacts. Ion∕Ioff ratio exceeds 108 and the leakage current is less than 10−13A, while the field effect mobility is in the range of 0.13cm2∕Vs and the subthreshold slope is 0.6V∕decade. Time stress bias measurements show β of 0.156 for HW a-Si TFTs, showing superior stability compared to their fully PECVD counterparts.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.046
Threshold uncertainty score1.000

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0010.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0010.000
Bibliometrics0.0010.002
Science and technology studies0.0000.001
Scholarly communication0.0000.001
Open science0.0010.000
Research integrity0.0010.001
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.008
GPT teacher head0.208
Teacher spread0.200 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations4
Published2006
Admission routes2
Has abstractyes

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