Design and Characterization of a Capacitive Micromachined Transducer With a Deflectable Bottom Electrode
Bibliographic record
Abstract
Multiple moving membrane capacitive micromachined ultrasonic transducers ( $\text{M}^{\mathrm {{3}}}$ -CMUTs) employ a multiple vibrating plate configuration. The presence of an additional plate improves the transducer properties. In this letter, the device displacement amplitude is further enhanced through eliminating the transducer fixed electrode and employing a deflectable plate as the bottom electrode. A set of air-coupled transducers with the effective plate radius of $65~\mu \text{m}$ has been fabricated. Electrical and optical measurements were conducted. It is demonstrated that the transducer with a deflectable bottom electrode exhibits larger top plate displacement amplitude compared with the conventional CMUTs as well as the $\text{M}^{\mathrm {{3}}}$ -CMUT with a fixed bottom electrode. A maximum of a 57% and 4% increase in the plate displacement is achieved at a dc bias level of 27 V for the transducer with vibrating bottom electrode compared with the conventional CMUT and $\text{M}^{\mathrm {{3}}}$ -CMUT with a fixed bottom electrode, respectively.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.001 | 0.001 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.001 | 0.001 |
| Open science | 0.002 | 0.000 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".