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Record W2099276265 · doi:10.1109/iitc.2008.4546943

Integration Aspects of CoWP Capping Layers for Electromigration Enhancement

2008· article· en· W2099276265 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

Venuenot available
Typearticle
Languageen
FieldMaterials Science
TopicCopper Interconnects and Reliability
Canadian institutionsAdvanced Micro Devices (Canada)
FundersFreistaat SachsenEuropean Commission
KeywordsElectromigrationMaterials scienceTime-dependent gate oxide breakdownDielectric strengthCopperDielectricReliability (semiconductor)Degradation (telecommunications)Node (physics)Electronic engineeringOptoelectronicsComposite materialMetallurgyElectrical engineeringPower (physics)TransistorGate dielectric

Abstract

fetched live from OpenAlex

CoWP metal caps have been integrated into 65nm- and 45nm-node copper interconnects. A number of CoWP specific integration aspects have been investigated. Electrical performance, reliability and yield potential were characterized on a statistical base. Substantial progress has been made to suppress the CoWP related time-depended dielectric breakdown (TDDB) degradation making CoWP the option to solve the electromigration (EM) challenge for 32nm and beyond.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.063
Threshold uncertainty score0.400

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.025
GPT teacher head0.263
Teacher spread0.238 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Quick stats

Citations5
Published2008
Admission routes1
Has abstractyes

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