Wafer-level packaging of three-dimensional MOEMS device with lens diaphragm
Bibliographic record
Abstract
This paper presents wafer level packaging of a miniature MOEMS monochromator for biomedical spectroscopy. Optical microlens and piezoelectrically-actuated diffraction grating are fabricated, and packaged at a wafer level into a complete, integrated monochromator with a fiber input. The packaged monochromator is an optical and mechanical system derived from a macroscale Czerny Turner monochromator. It integrates an angled mirror for folding and directing the input light path. A lithographically-defined reflective diffraction grating accepts and spectrally separates the input light from a fiber that is inserted into the built-in groove. The diffracted light is then collected through a diaphragmsuspended microlens and spatially separated on its path towards the output of the system. The packaging, done via encapsulated silicon cavities, provides batch processing and finishing of the complete device. The MLD is characterized with a Gaussian beam propagation model and the SSC packaged device is measured by its resolution and stray light through profiling with a CCD array.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".