Effects of Film Thickness and Preferred Orientation on the Dieletric Constants of Hf-Aluminate Films Deposited by PEALD
Bibliographic record
Abstract
The thickness changes in Hf aluminate films deposited by PEALD were investigated by modifying the process sequence. The conventional supercycle of Hf aluminate film is composed of two groups of subcycles allocated to deposit Al2O3 and HfO2 films. The dielectric constants of these thin films decrease with decreasing film thickness. This decrease originates to a changing preferred orientation from (200) to (111). Using the modified supercycle which has a periodically addition of small dose of Al2O3 in HfO2 thin film, the HfO2 film was transformed from (111) preferred orientation to (200) preferred orientation. As a result of preferred orientation change, the dielectric constant of films increased up to 22.5
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".