Super-junction LDMOST on a silicon-on-sapphire substrate
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Bibliographic record
Abstract
A super-junction lateral double diffused MOST (SJ-LDMOST) in silicon-on-sapphire technology, targeting power integrated circuits (PICs), is proposed, implemented and characterized. The proposed structure eliminates "substrate-assisted-depletion" effects in lateral SJ devices thus achieving charge compensation between the n and p SJ-pillars as well as a uniform electric field distribution in the drift region in the off-state. Three-dimensional (3-D) simulations of the device, using realistic aspect ratios for the SJ-pillars, indicate that a significant reduction in specific on-resistance for a given breakdown voltage can be achieved as compared to conventional reduced surface field (RESURF) devices. Experimental devices were implemented using a seven mask CMOS compatible process. Fabricated SJ-LDMOSTs with a drift region length of 66 /spl mu/m and a pillar aspect ratio of 1.2 /spl mu/m/0.7 /spl mu/m (width/height) exhibit a specific on-resistance of 0.82 /spl Omega/.cm/sup 2/ and a breakdown voltage (BV) ranging between 500 and 600 V corresponding to less than 8.5% charge imbalance in the pillars.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it