Photo-assisted electrochemical machining of micromechanical structures
Bibliographic record
Abstract
Stress-free micromechanical cantilever beams have been fabricated by selective etching of silicon p-n structures in HF solutions utilizing a photo-assisted electrochemical process. With this technique, n or p regions can be selectively etched at controlled rates by appropriate choice of cell bias, p-n junction bias, and illumination intensity. p-Si can be selectively etched by utilizing illumination of the p-n junction to anodically bias the p-layer relative to the n-substrate. Etch rates of up to 5 mu m/min resulted in the formation of porous layers readily removed with chemical Si etching solutions. n-Si can be selectively etched by illuminating and applying a reverse bias across the p-n junction, driving the p-layer cathodic. Etch rates up to 10 mu m/min and high resolution etch stops with smooth surfaces were obtained. The effects of key variables, including doping type, cell bias, p-n junction bias, and illumination intensity, on etch rate, selectivity, and surface finish are discussed.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.016 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".