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Record W2109028022 · doi:10.1088/0964-1726/16/5/029

Millimeter-sized nanomanipulator with sub-nanometer positioning resolution and large force output

2007· article· en· W2109028022 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueSmart Materials and Structures · 2007
Typearticle
Languageen
FieldEngineering
TopicAdvanced MEMS and NEMS Technologies
Canadian institutionsUniversity of Toronto
Fundersnot available
KeywordsMicroactuatorMicroelectromechanical systemsMaterials scienceMillimeterCompliant mechanismCapacitive sensingMicrometerNanometreElectronic engineeringFinite element methodOpticsNanotechnologyActuatorEngineeringElectrical engineeringPhysicsStructural engineering

Abstract

fetched live from OpenAlex

Nanomanipulation in space-limited environments (e.g., inside a SEM (scanning electron microscope), and particularly in a TEM (transmission electron microscope)) requires small-sized nanomanipulators that are capable of producing sub-nanometer positioning resolutions and large output forces. This paper reports on a millimeter-sized MEMS (microelectromechanical systems) based nanomanipulator with a positioning resolution of 0.15 nm and a motion range of ± 2.55 µm. An amplification mechanism is employed to convert micrometer input displacements, generated by a conventional electrostatic comb-drive microactuator, into sub-nanometer output displacements. The device has a high load driving capability, driving a load as high as 98 µN without sacrificing positioning performance. Based on the pseudo-rigid-body approach, closed-form analytical models of the minification ratio and stiffness of the amplification mechanism are developed. Finite element simulation and testing results verify that the theoretical models are valid with an error smaller than 6.2% and that the mechanism has a high linearity (± 2.4%). The amplification mechanism and analytical models have general applicability to other MEMS transducer designs. A capacitive displacement sensor is integrated for detecting input displacements that are converted into output displacements via the minimization ratio, allowing closed-loop controlled nanomanipulation. The MEMS-based nanomanipulators are applicable to the characterization/manipulation of nanomaterials and construction of nanodevices.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.063
Threshold uncertainty score0.482

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.007
GPT teacher head0.201
Teacher spread0.194 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it