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Record W2109495827 · doi:10.1109/tsm.2007.907613

A Fab-Wide APC Sampling Application

2007· article· en· W2109495827 on OpenAlexaff
Andre Holfeld, Robert Barlović, Richard Good

Bibliographic record

VenueIEEE Transactions on Semiconductor Manufacturing · 2007
Typearticle
Languageen
FieldEngineering
TopicIntegrated Circuits and Semiconductor Failure Analysis
Canadian institutionsAdvanced Micro Devices (Canada)
Fundersnot available
KeywordsMetrologyReliability engineeringSampling (signal processing)Event (particle physics)Process (computing)Computer scienceProcess variationDuration (music)Fault detection and isolationEngineeringSemiconductor device fabricationMicroprocessorManufacturing engineeringReal-time computingEmbedded systemWaferArtificial intelligenceOperating systemDetectorMathematicsTelecommunications

Abstract

fetched live from OpenAlex

In microprocessor manufacturing it is very important to monitor the processed material on certain metrology steps. This is done in order to characterize the manufacturing process by verifying correct processing and ensuring availability of adequate information on the contributors to process variance. In state-of-the-art technologies it has become increasingly challenging to measure all possible and relevant sources of variation. Because low cycle time (manufacturing duration) is of such high importance, it is necessary to minimize the amount of inspection operations/duration on processed material. This paper details the integrated lot-level and wafer-level sampling application deployed in AMD's Fab30 and Fab36, which is capable of providing the means to capture lot, wafer, and event-based sources of variation by best utilizing the available metrology resources. It will also highlight the connection of this application into the areas of advanced-process-control, run-to-run, fault-detection and classification (APC, RtR, FDC).

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.001
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: none
GenreCandidate signal: Empirical · Consensus signal: none
Teacher disagreement score0.010
Threshold uncertainty score0.034

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.001
Meta-epidemiology (narrow)0.0010.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0010.001
Science and technology studies0.0000.000
Scholarly communication0.0010.000
Open science0.0010.001
Research integrity0.0010.000
Insufficient payload (model declined to judge)0.0100.003

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.016
GPT teacher head0.231
Teacher spread0.215 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations32
Published2007
Admission routes1
Has abstractyes

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