Bibliographic record
Abstract
In microprocessor manufacturing it is very important to monitor the processed material on certain metrology steps. This is done in order to characterize the manufacturing process by verifying correct processing and ensuring availability of adequate information on the contributors to process variance. In state-of-the-art technologies it has become increasingly challenging to measure all possible and relevant sources of variation. Because low cycle time (manufacturing duration) is of such high importance, it is necessary to minimize the amount of inspection operations/duration on processed material. This paper details the integrated lot-level and wafer-level sampling application deployed in AMD's Fab30 and Fab36, which is capable of providing the means to capture lot, wafer, and event-based sources of variation by best utilizing the available metrology resources. It will also highlight the connection of this application into the areas of advanced-process-control, run-to-run, fault-detection and classification (APC, RtR, FDC).
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.001 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.001 | 0.000 |
| Open science | 0.001 | 0.001 |
| Research integrity | 0.001 | 0.000 |
| Insufficient payload (model declined to judge) | 0.010 | 0.003 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".