Electron Trapping in 4H-SiC MOS Capacitors Fabricated by Sodium-Enhanced Oxidation
Bibliographic record
Abstract
The electrical properties of the SiO 2 /SiC interface fabricated by sodium-enhanced oxidation (SEO) of n-type 4H-SiC were studied by temperature-dependent C-V and constant-capacitance deep level transient spectroscopy (CCDLTS). With the exception of near-interface traps in the SiC epi-layer, which are not present in the SEO samples, the trap species observed in SEO capacitors are the same as those observed in both standard-oxidized and NO-annealed MOS capacitors. Total electron trapping in accumulation is comparable in SEO and NO-annealed capacitors; however, the traps in SEO capacitors are located at the interface whereas tunneling into oxide traps is observed in NO-annealed samples. A series of bias-temperature stress tests show that electron trapping is essentially unchanged when mobile sodium ions are moved toward the interface. The improved mobility attained by this process compared to NO annealing may be due to the absence of near-interface SiC traps in SEO samples.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".