CMOS-MEMS integrated scanning microwave microscopes
Why this work is in the frame
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Bibliographic record
Abstract
We present, for the first time, the design, fabrication and experimental validation of a CMOS-MEMS scanning microwave microscopy (SMM) system. A flexible micro-coaxial transmission line is collocated with an AFM probe on a single CMOS-MEMS chip and is scanned by integrated electrothermal actuators with integrated position sensors. The microwave/AFM tip can be scanned over the sample in 3 degrees of freedom, over a 20μm × 10μm × 30μm scan range in the x, y, and z directions respectively. SMM devices with integrated 3-DoF actuation fabricated with post-CMOS MEMS integration are then introduced. These devices can be used to modulate the tipsample separation with a periodic signal, enabling the use of lock-in techniques to improve immunity to long-term system drifts. To increase measurement sensitivity further, a single-stub matching network has been used to match the high tip-to-sample impedance to the 50-ohm characteristic impedance of the measurement system. Measurement results of the CMOS-MEMS SMM are presented to verify the proposed concept.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.003 | 0.003 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it