A photonic crystal technology compatible with integrated circuit technologies
Bibliographic record
Abstract
Amorphous silicon oxy-nitride (a-SixOyN1-x-y) films with refractive indices in a wide range of 1.43-1.75 were obtained by plasma-enhanced chemical vapour deposition of silane, nitrous oxide, and ammonia gases at 30°C. Photonic crystal slabs based on a-SixOyN1-x-ymaterial systems were simulated and fabricated. Low-contrast photonic crystal structures for which the refractive index difference between the cladding and the core is small are implemented using this technology. It is shown that even low-contrast photonic crystals can provide fairly wide bandgap. The films were patterned by electron-beam lithography and etched by reactive ion etching. The device fabrication is carried out at low temperature and is independent of the substrate type. Therefore, this technology can be used to integrate photonic crystal-based optical integrated circuits within silicon- and GaAs-based integrated circuits.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.001 | 0.000 |
| Scholarly communication | 0.001 | 0.001 |
| Open science | 0.001 | 0.001 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.012 | 0.007 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".