Self-actuating scanning microwave microscopy probes
Bibliographic record
Abstract
We present the design and experimental results of a scanning microwave microscopy (SMM) system that does not require the use of a conventional atomic force microscope (AFM). Microfabricated SMM probes are actuated by integrated MEMS scanners in a commercially available multi-user process. This design is unique in the sense that the tip can be scanned over the sample both laterally and vertically, over a 10µm × 10µm scan range. We first validate our approach with a test-bench consisting of a fixed probe and an integrated sample-scanning stage. This device is used to obtain characteristic approach curves of S11 as a function of tip-sample separation. We then investigate the effect of tip-sample separation on the resolution of the instrument. CPW probes with integrated 1-D and 2-D actuation are then presented. These devices can be used to modulate the tip-sample separation to off-chip samples with a periodic (200Hz) signal, improving immunity to long-term system drifts. To increase measurement sensitivity, a single-stub matching network has been used to match high tip to sample impedance to the 50 ohm of a performance network analyzer. Measurement results agree very well with reported SMM measurements in the literature
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".