Influence of different RTP temperature profiles on low temperature epitaxially grown PECVD Si emitters
Bibliographic record
Abstract
Highly phosphorous doped epitaxial emitters grown using low-temperature PECVD (LT-PECVD) process have been investigated after subjecting them to different rapid thermal processing (RTP) treatments. Cross-sectional High Resolution Transmission Electron Microscopy (HRTEM) was used to analyze the interface quality and the changes in the atomic arrangement due to the different RTP treatments. Three different RTP temperature profiles were used for this study: (i) ?Pulsed Profile? with high heating and cooling rates of 70 and 35?C/s and with a peak temperature of 750?C applied in 4 cycles of 25 s each, (ii) ?Two-Step Profile?, where the temperature is ramped to 400?C at a rate of 37.5?C/s, stabilized for 10 minutes, ramped again go 750?C where it is annealed for 60s, and (iii) ?Multi-step Profile?, in which a peak annealing temperature of 850?C is reached after undergoing several intermediate temperatures and different ramp rates. Hydrogen effusion induced by the RTP treatments, its influence on the quality of the epitaxial emitter at both interface and the bulk are investigated. Secondary Ion Mass Spectroscopy (SIMS) was used to monitor the phosphorous concentration and to estimate the hydrogen content. Cross-sectional HRTEM confirmed that a very high quality single crystal epitaxial emitter is results from our LT-PECVD proccess. The developed epitaxial emitter is very promising for LT Si solar cells as confirmed by spectral response on the prepared test structures. SIMS estimates indicate that the hydrogen concentration gets reduced by more than one order of magnitude after the RTP treatment with a pulsed profile. The strong hydrogen effusion with RTP treatments having high heating and cooling rates (the pulsed and 2-step profiles) affects both the interface and the bulk quality of the n <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> p junction test structures. The defect density seems to increase resulting in more recombination centers. RTP treatment with lower ramps (the multi-step profile) is found to be beneficial.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".