Monolithically fabricated polymermems 3-axis thermal accelerometers designed for automated wirebonder assembly
Bibliographic record
Abstract
This paper reports on two novel 3-axis thermal accelerometers based on different mechanical structures that are fabricated using polyimide PI-2611, and assembled using a standard wire-bonder. One accelerometer design has an un-amplified linear DC sensitivity of ±45μV/g, ±60μV/g, and ±35μV/g on the X, Y, and Z axes respectively. The second design has a sensitivity of ±17μV/g, ±8.5μV/g, and ±14μV/g respectively. Both accelerometers are assembled by applying a lateral push to each of the out-of-plane parts using an unmodified wirebonder. This paper will detail the fabrication, design, assembly, and functional results of the two 3-axis thermal accelerometer designs.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.001 | 0.001 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".