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Record W2141524474 · doi:10.1080/00207543.2010.484429

Optimisation of the process control in a semiconductor company: model and case study of defectivity sampling

2010· article· en· W2141524474 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueInternational Journal of Production Research · 2010
Typearticle
Languageen
FieldDecision Sciences
TopicAdvanced Statistical Process Monitoring
Canadian institutionsPolytechnique Montréal
Fundersnot available
KeywordsSampling (signal processing)Plan (archaeology)Control (management)Process (computing)Computer scienceMetrologySemiconductor device fabricationProcess controlReliability engineeringWafer fabricationManufacturing engineeringSet (abstract data type)WaferIndustrial engineeringEngineeringSystems engineeringArtificial intelligenceMathematicsStatistics

Abstract

fetched live from OpenAlex

This article studies the skip, under some assumptions, of process control operations. The case of one tool, one enhanced buffer and one metrology tool of a monotonic parameter is analysed. This article presents circumstances in which control plan can be optimised due to the buffer's behaviour. After discussing the industrial issue of defectivity, this article presents a literature review followed by the model and steps towards industrial development. Then demonstrator, which is applied at a case study of defectivity sampling, is presented. A test of over a 300-mm wafer fabrication data set shows serious improvements – around 35% of defectivity controls have been skipped compared to the static sampling plan.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.007
metaresearch head score (Gemma)0.019
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMetaresearch
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Simulation or modeling · Consensus signal: none
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.296
Threshold uncertainty score0.989

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0070.019
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0010.000
Science and technology studies0.0000.000
Scholarly communication0.0000.001
Open science0.0010.000
Research integrity0.0000.001
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.373
GPT teacher head0.576
Teacher spread0.204 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it