MétaCan
Menu
Back to cohort
Record W2143734697 · doi:10.1109/asmc.2010.5551462

Recent innovations in DRAM manufacturing

2010· article· en· W2143734697 on OpenAlexaff
Dick James

Bibliographic record

Venuenot available
Typearticle
Languageen
FieldEngineering
TopicSemiconductor materials and devices
Canadian institutionsChipworks (Canada)
Fundersnot available
KeywordsDramNode (physics)CapacitorProduct (mathematics)ElectronicsSemiconductor industryDynamic random-access memoryComputer scienceEngineeringElectrical engineeringOperating systemManufacturing engineeringComputer hardwareMathematicsSemiconductor memory

Abstract

fetched live from OpenAlex

Recent generations of Dynamic Random Access Memory (DRAM) have seen remarkable changes in both processes and the materials used. In the past five years the industry has gone from the 9x-nm node through the 7x, 6x, and 5x nodes to the 4x node chips starting to come on the market. In retrospect it is little short of amazing that the competing companies have crammed the required ~25 fF into an ever decreasing amount of floorspace; the cell size of the latest 4x-nm DRAM is ~0.0137 μm2- or maybe we should say ~13,700 nm2. This has been achieved by the adoption of dual-layer capacitors, high-k dielectrics, and raised source/drains, among other techniques. Chipworks, as a supplier of competitive intelligence to the semiconductor and electronics industries, monitors the evolution of chip technologies as they come into commercial production. Chipworks has obtained parts from the leading edge manufacturers, and performed structural and compositional analyses to examine the features and manufacturing processes of the devices. This paper illustrates some of the different structures of DRAM cells seen in the last few years from some of the leading companies in the sector, ranging from the 9x-nm node to the latest 4x-nm product.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.004
metaresearch head score (Gemma)0.004
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Not applicable · Consensus signal: none
GenreCandidate signal: Review · Consensus signal: Review
Teacher disagreement score0.019
Threshold uncertainty score0.063

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0040.004
Meta-epidemiology (narrow)0.0010.001
Meta-epidemiology (broad)0.0010.001
Bibliometrics0.0020.003
Science and technology studies0.0010.001
Scholarly communication0.0030.004
Open science0.0020.002
Research integrity0.0030.003
Insufficient payload (model declined to judge)0.0190.011

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.012
GPT teacher head0.223
Teacher spread0.211 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designNot applicable
Domainnot available
GenreReview

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations24
Published2010
Admission routes1
Has abstractyes

Explore more

Same topicSemiconductor materials and devicesFrench-language works237,207