Low-Stress CMOS-Compatible Silicon Carbide Surface-Micromachining Technology—Part I: Process Development and Characterization
Why this work is in the frame
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Bibliographic record
Abstract
A low-temperature (<; 300 °C) low-stress microelectromechanical systems fabrication process based on a silicon carbide structural layer is presented. A partially conductive sintered target enables low-temperature dc sputtering of amorphous silicon carbide (SiC) at high deposition rates (75 nm/min). The low stress of the structural film allows for mechanically reliable structures to be fabricated, while the low-temperature deposition allows for pre-SiC metallization. The process is designed for low-cost film deposition and for complementary metal-oxide-semiconductor postintegration, stemming from chemical and thermal compatibility. Process flow, deposition, etching, and stress control are discussed, and a detailed process characterization is reported.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it